KH-64-S

tmax up to 260 °C

Clean room chamber furnace, gastight, Tmax 260 °C, 64 l, 5kW

Applications:

annealing, curing, drying, surface coating

Surface modification of wafer in protective gas atmosphere

Other possible applications are:

Coating processes in electronics and semiconductor industry

Product Specifications

The most important characteristics:

2-zone electrically heated

Clean room class 100

Residual oxygen measurement

Fast cooling

Max. continuous working temperature 260°C

Useful chamber volume 64l

Stainless steel (1.4301) chamber, electro polished

Gas feeding device (Ar, N₂)

Heated by tubular heating element

Heating power approx... 5 kW

Temperature accuracy +/-3k

Gas-circulation

We make it possible:

Linn High Therm is specialized in adapting its products to customer’s requirements. Please let us know if you need any modifications. We will do everything to satisfy your wishes.

Possible Standardized Options

Different controller systems

Emergency water cooling

Process Guiding Software

Circulation cooler

Burning-off device with flame supervision

Safety package

Product properties

Product Line:	special product
Operation Mode:	Batch
Construction Types:	Furnace
Designs:	Chamber furnace
Temperature Max (°C):	260
Heatings:	electrical
Heatingmethods:	resistance
Atmospheres:	Air, Controlled gas atmosphere
Applications:	annealing, curing, drying, surface coating

Products- Details