Products- Details

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Details

FRV-8-110/640/1500

tmax up to 1500 °C

VGF furnace for 4” GaAs bulk crystal growth

Applications:

crystal growing

For growth of 4” GaAs single crystals after the Vertical Gradient Freeze (VGF) process

Most important characteristics

  • Resistance heated furnace, bell-type design
  • 4” GaAs bulk crystal growth
  • Useful volume: diameter 110 mm, height 640 mm
  • 8 heating zones, individually controllable
  • Max. working temperature 1500°C
  • heating power 12 kW
  • Processing gas: Argon, pre-evacuation possible
  • pressure vessel with max. operating pressure of 10 bar
  • surveillance thermocouples in seeding area
  • Al2O3 tube for temperature homogeneity, quartz glass ampoule for heater protection
  • Fully-automated touchscreen PLC system
  • Temperature accuracy +/- 0.2 K
  • Cooling baffle inside pressure vessel to adjust vertical heat flux
  • Prepared for later upgrade to 6” crystal size

We make it possible

Linn High Therm is specialized in adapting its products to customer’s requirements. Please let us know if you need any modifications. We will do everything to satisfy your wishes.

Possible standardized options

  • Emergency water cooling
  • Process Guiding Software
  • Bottom-loader design
  • Circulation cooling unit
  • Simulations of VGF process for 2”, 4” and 6” growth
  • Crystal growth training by renowned German research institute
  • 2” heating setup
  • 6” heating setup

Product properties

Product Line: special product
Operation Mode: Batch
Construction Types: Furnace
Designs: Bell type furnace, Tube furnace
Temperature Max (°C): 1500
Heatings: electrical
Heatingmethods: resistance
Atmospheres: Air, Controlled gas atmosphere, Overpressure, Vacuum
Applications:crystal growing